| Zugriffsnummer | 44487 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Inverted plasmonic lens design for nanometrology applications |
| Autor(in); Institution |
Käseberg, Tim; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Siefke, Thomas; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig; Friedrich-Schiller Universität Jena, Jena, GERMANY
Kroker, Stefanie; 4.01, Metrologie für funktionale Nanosysteme, PTB-Braunschweig; Technische Universität Braunschweig, LENA Laboratory for Emerging Nanometrology, Braunschweig, GERMANY
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
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| Quelle/Jahr | Measurement Science and Technology: 31 (2020), 7, 1 - 10 |
| Artikelnummer | 074013 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Konferenzangaben | NanoScale 2019 - 12th Seminar on Quantitative Microscopy and 8th Seminar on Nanoscale Calibration, Standards and Methods, Braunschweig, 15-16, October, 2019, Germany |
| Zusammenfassung | Planar plasmonic lenses have attracted a great deal of interest over the last few years for their super-resolution focusing capabilites. These highly compact structures with dimensions of only a few micrometres allow for the focusing of light to sub-wavelength-sized spots with focal lengths reaching into the far-field. This offers opportunities for new methods in nanometrology; for example, applications in microscopic Mueller matrix ellipsometry setups. However, the conventional plasmonic lens is challenging to fabricate. We present a new design for plasmonic lenses, which is called the inverted plasmonic lens, to accommodate the lithographic fabrication process. In this contribution, we used numerical simulations based on the finite element method in combination with particle swarm optimization to determine ideal parameter ranges and tolerances for the design of inverted plasmonic lenses for different wavelengths in the visible and near-infrared domain and focal lengths between 5 μm and 1 mm. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Themenbereich der Metrologie | Nanometrologie |
| Forschungsprojekt | Light-matter interplay for optical metrology beyond the classical spatial resolution limits (BeCOMe) |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2017 Fundamental Titel der Förderung: 17FUN01: BeCOMe: Light-matter interplay for optical metrology beyond the classical spatial resolution limits Förderungsnummer: 17FUN01 |