| Zugriffsnummer | 44397 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Design and manufacturing of large range, discrete step chirp standards |
| Autor(in); Institution |
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Verhülsdonk, Stefan; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
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| Quelle/Jahr | euspen's 20th International Conference & Exhibition, Virtual International Conference, Virtual Conference, 08-12, June, 2020, Proceedings:(2020), 397 - 400 |
| ISBN | 978-0-9957751-7-6 |
| Konferenzangaben | euspen's 20th International Conference & Exhibition, Virtual International Conference, Virtual Conference, 08-12, June, 2020, Virtual Conference, 08-12, June, 2020 |
| Freie Schlagworte | design ; turning ; ultra-precision ; measurement |
| Zusammenfassung | Ultraprecison diamond turning is used to manufacture standards for tactile and non-contact measurement devices at Physikalisch-Technische Bundesanstalt (PTB). Besides different types of roughness standards and depth setting standards, a novel chirp artefact is developed to determine the transfer function and topography fidelity of optical measuring devices. Reaching the limits of these instruments, the mechanical manufacturing technology reaches its limits too with a radius of curvature of a single micrometre. The nickel-phosphorus-plated standard has an outer diameter of 84 mm. It incorporates coarse structures with a depth up to 24 μm and in addition modulated but stepwise discrete periodic structures with wavelengths in the range from 3.2 μm to 13 μm and amplitudes in the range from 400 nm to 1 μm. The first main challenge for the turning process is the limited lifetime of the small diamond tool. The second is the use of two tools with the necessary spatial correlation of different tool centre points for working the same workpiece. The design of the standards is optimized for this task. Measurement results of optical and tactile instruments as well as atomic force microscopy are compared. The suitability of the functional design can be shown. Furthermore, it can be concluded, that the chipping mechanism of nickel-phosphorus may change with the size of the small diamond tool. |
Zitierung
Meeß, R., Felgner, A., & Verhülsdonk, S. (2020). Design and manufacturing of large range, discrete step chirp standards. euspen's 20th International Conference & Exhibition, Virtual International Conference, Virtual Conference, 08-12, June, 2020, Virtual Conference, 08-12, June, 2020.