| Zugriffsnummer | 44392 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements |
| Autor(in); Institution |
Behle, Heinrich; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | SMSI 2020 - Sensors and Instrumentation, Proceedings:(2020) |
| ISBN | 978-3-9819376-2-6 |
| DOI | |
| Konferenzangaben | Sensor and Measurement Science International Conference, SMSI 2020 (cancelled), Nürnberg, 22-25, June, 2020, Germany |
| Freie Schlagworte | FEM ; Mode analysis ; Diamond tips ; Piezoresistive Si-Cantilever ; Roughness Measurements |
| Zusammenfassung | In this article we present an FEM analysis of the change in resonance behaviour of 5 mm long piezoresistive cantilevers when they are modified with pencil shaped diamond tips of varying length. In a setup with glued cantilever base the length of the fixed bearing was examined as well. Simulations show that for a free cantilever base length of one fifth of the base no base oscillations occur. Base oscillations only occur for higher order modes of resonance with free base lengths greater one fifth. [Conference did not take place because of Covid-19 virus pandemic, but the proceedings were published.] |
Zitierung
Behle, H. & Brand, U. (2020). Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements. Sensor and Measurement Science International Conference, SMSI 2020 (cancelled), Nürnberg, 22-25, June, 2020, Germany. https://doi.org/10.5162/smsi2020/p2.7