| Zugriffsnummer | 44280 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | True 3D-AFM sensor for nanometrology |
| Autor(in); Institution |
Thiesler, Jan; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Tutsch, Rainer; TU Braunschweig, Institut für Produktionsmesstechnik, Braunschweig, GERMANY
Fromm, Karsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Dai, Gaoliang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
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| Quelle/Jahr | Measurement Science and Technology: 31 (2020), 7, 1 - 11 |
| Artikelnummer | 074012 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Konferenzangaben | NanoScale 2019 - 12th Seminar on Quantitative Microscopy and 8th Seminar on Nanoscale Calibration, Standards and Methods, Braunschweig, 15-16, Oktober, 2019, Deutschland |
| Freie Schlagworte | 3D nanometrology ; atomic force microscopy (AFM) ; critical dimension AFM (CD-AFM) ; true 3D-AFM ; 3D sensivity |
| Zusammenfassung | A new three dimensional (3D) atomic force microscopic (AFM) probe, referred to as the 3D-Nanoprobe is introduced. The 3D Nanoprobe is realized by introducing flexure hinge structures to the cantilever of a conventional critical dimension AFM (CD-AFM) probe. It has quasi-isotropic stiffness in 3D directions and is thus more powerful for detecting 3D tip-sample interaction forces in AFM measurements. In addition, the stiffness of the 3D-Nanoprobe is balanced to the bending stiffness of slender CD-AFM tips, offering improved 3D sensitivity. In this paper, a design example of a 3D-Nanoprobe based on a CD-AFM probe with a tip nominal diameter of 70 nm is presented. The design parameters are optimized via theoretical modelling and finite element analysis (FEA) method. The simulation results indicate that the designed 3D-Nanoprobe has much better performance than that of the original CD-AFM probe, for instance, its stiffness' anisotropy ratio (including the tip contribution) has been improved from 8:8:1 (x, y, z) to 0.7:0.8:1 (x, y, z). The probing sensitivity is improved by a factor of more than 99, 128 and 1.5 in x-, y- and z-direction, respectively. Moreover, the designed 3D-Nanoprobe has the first bending mode eigenfrequency of 46 kHz and the first torsional mode eigenfrequency of 177,6 kHz. The 3D Nanoprobe has been manufactured by applying a focused ion beam (FIB) tool. Finally, to detect the full 3D interaction forces by the 3D-Nanoprobe, a new AFM-head prototype which consists of two independently adjustable dual optical levers have been developed. |
| Themenbereich der Metrologie | Nanometrologie |