| Zugriffsnummer | 43993 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Micro coordinate measuring machine using voice coil actuators with interferometric position feedback control |
| Autor(in); Institution |
Molnar, Gabor; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bütefisch, Sebastian; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Werner, Christian Andreas; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Yu, Liang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Meeß, Rudolph; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Laser Metrology and Machine Performance XIII : 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance : Lamdamap 2019:(2019), 41 - 48 |
| Herausgeber(in) |
Blunt, Liam
|
| ISBN | 978-0-9957-7513-8 |
| URL | |
| Verlag | Bedfordshire: Euspen |
| Konferenzangaben | 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance, Sheffield, 13-14, March, 2019, UK |
| Freie Schlagworte | interferometry ; interferometer ; displacement measurement ; optical metrology ; positioning stages ; coordinate metrology ; coordinate measuring machines ; CMM ; voice coil actuators ; micro metrology |
| Zusammenfassung | Quantitative determination of structure properties like length, diameter, height, etc. is essential in research, development and in production process control. Coordinate measuring machines (CMMs) are widely used to measure these parameters. The properties of the two key components of a CMM - the probing system and the positioning stage - define directly the achievable precision of the CMM. Commercial positioning stages for the micro- and nanoscale usually employ capacitive or inductive position sensors. Both technologies offer a resolution in the nanometre range, but the achievable scanning range is restricted. In addition, they require a (periodical) calibration. To overcome this restriction, we integrated a newly developed positioning system in our μCMM: a voice coil-based actuator with a built-in interferometric encoder. The scanning range of the introduced solution covers about 15 mm with a sub-nanometre resolution. To achieve this, we apply a new interferometer system based on a modified homodyne Twyman-Green interferometer concept [1]. The deployed probing system uses a ruby ball stylus probe and was developed at PTB in the recent years [7]. This probe is manufactured using micro technical production methods. It is a measuring probe, thus it provides a signal corresponding to the deflection of the probe for all three spatial directions. These probes provide nanometre resolution. [1] S. Strube, G. Molnar, H.-U. Danzebrink, Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range, Meas. Sci. Technol. 22 (2011) 094026 doi: 10.1088/0957-0233/22/9/094026 [7] S. Bütefisch, G. Dai, H.-U. Danzebrink, L. Koenders, F. Solzbacher, F.; M.P. Orthner, Novel design for an ultra high precision 3D micro probe for CMM applications, EUROSENSORS XXIV, 2010, Linz, 05-08 September, 2010, Austria |
| Themenbereich der Metrologie | Nanometrologie |
Zitierung
Molnar, G., Bütefisch, S., Werner, C. A., Yu, L., Meeß, R., Danzebrink, H.-U., & Flügge, J. (2019). Micro coordinate measuring machine using voice coil actuators with interferometric position feedback control. 13th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM & Robotic Performance, Sheffield, 13-14, March, 2019, UK.