| Zugriffsnummer | 43849 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Deutsch |
| Titel | Grenzen der Meßgenauigkeit |
| Autor(in); Institution |
Kunzmann, Horst; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Feinbearbeitung : Schlüsseltechnologie für die Fabrik der Zukunft - Tagungsberichtsband:(1987), 20.1 - 20.20 |
| Konferenzangaben | 5. Internationales Braunschweiger Feinbearbeitungskolloquium, Braunschweig, 8-10, April, 1987, Deutschland |
| Zusammenfassung | In dimensional metrology are several limiting quantities to be overcome, if improvements in accuracy should be possible: vacuum wavelength of lasers, refractive index of air, temperature of 20°C, thermal coeff. of expansion, microtopography and its relevance to dimensions, stability of material. - It is shown, that the ultimate accuracy of the measurement of displacement and microtopography (monocristals) ˜0.01 nm, microtopography (techn. surfaces) ˜1 nm, length ˜10 nm. Accuracy is length dependent and rel. uncertainty is always larger than 10-8. |
