| Zugriffsnummer | 43281 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings |
| Autor(in); Institution |
Fernández Herrero, Analía; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Pflüger, Mika; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Probst, Jürgen; HZB, Berlin, GERMANY
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Optics Express: 27 (2019), 22, 32490 - 32507 |
| ISSN | 1094-4087 |
| DOI | |
| URL | |
| Verlag | New York, NY: Optical Society of America (OSA) |
| Zusammenfassung | Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the performance. Grazing-incidence small-angle X-ray scattering is a characterization method that is sensitive to three-dimensional structures and their imperfections. To quantify line-edge roughness, a Debye-Waller factor (DWF), which is derived for binary gratings, is usually used. In this work, we systematically analyze the effect of roughness on the diffracted intensities. Two different limits to applying the DWF are found depending on whether or not the roughness is normally distributed. |
| Kostenfreier Zugang | Open Access Gold |
| Rechteinformation | OSA Open Access Publishing Agreement |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Fernández Herrero, A., Pflüger, M., Probst, J., Scholze, F., & Soltwisch, V. (2019). Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings. Optics Express, 27(22), 32490–32507. https://doi.org/10.1364/oe.27.032490