| Zugriffsnummer | 42952 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Traceable coplanar waveguide calibrations on fused silica substrates up to 110 GHz |
| Autor(in); Institution |
Arz, Uwe; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Kuhlmann, Karsten; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Dziomba, Thorsten; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Hechtfischer, Gerd; Rohde & Schwarz GmbH & Co. KG, Munich, GERMANY
Phung, Gia Ngoc; Ferdinand-Braun-Institut für Höchstfrequenztechnik, Berlin, GERMANY
Schmückle, Franz Josef; Ferdinand-Braun-Institut für Höchstfrequenztechnik, Berlin, GERMANY
Heinrich, Wolfgang; Ferdinand-Braun-Institut für Höchstfrequenztechnik, Berlin, GERMANY
|
| Quelle/Jahr | IEEE Transactions on Microwave Theory and Techniques: 67 (2019), 6, 2423 - 2432 |
| ISSN | 0018-9480 (PRINT) ; 1557-9670 (ONLINE) |
| DOI | |
| Verlag | New York, NY: IEEE |
| Freie Schlagworte | Calibration ; on-wafer ; S-parameters ; traceability ; uncertainty budget |
| Zusammenfassung | In this paper, we present a comprehensive uncertainty budget for on-wafer S-parameter measurements of devices on a custom-built fused silica wafer, including instrumentation errors, connector repeatability, and calibration standard uncertainties. All major steps toward achieving traceability with the aid of a multiline thru-reflect-line calibration for the given measurement scenario are explained. For the first time, it is now possible to compare against each other the relative importance of different sources of uncertainty in on-wafer measurements. Results are shown for three typical devices with varying reflection and transmission characteristics. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 3.0 ; Creative Commons Attribution 3.0 License |
| Themenbereich der Metrologie | Elektrizität und Magnetismus |
| Forschungsprojekt | 14IND02: PlanarCal: Microwave measurements for planar circuits and components |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2014 Industry Titel der Förderung: 14IND02: PlanarCal: Microwave measurements for planar circuits and components Förderungsnummer: 14IND02 |
Zitierung
Arz, U., Kuhlmann, K., Dziomba, T., Hechtfischer, G., Phung, G. N., Schmückle, F. J., & Heinrich, W. (2019). Traceable coplanar waveguide calibrations on fused silica substrates up to 110 GHz. IEEE Transactions on Microwave Theory and Techniques, 67(6), 2423–2432. https://doi.org/10.1109/tmtt.2019.2908857