| Zugriffsnummer | 42896 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Development of a novel material measure for characterising instrument transfer function (ITF) considering angular-dependent asymmetries of areal surface topography measuring instruments |
| Autor(in); Institution |
Dai, Gaoliang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Seeger, Benedikt; Technische Universität Braunschweig, Braunschweig, GERMANY
Weimann, Thomas; 2.4, Quantenelektronik, PTB-Braunschweig
Xie, Weichang; Zeiss SMT GmbH, Oberkochen, GERMANY
Hüser, Dorothee; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Tutsch, Rainer; Technische Universität Braunschweig, Braunschweig, GERMANY
|
| Quelle/Jahr | Conference Proceedings - 19th International Conference & Exhibition, Monday 3rd to Friday 7th June 2019, Euskalduna Jauregia, Bilbao, Spain:(2019) |
| Konferenzangaben | 19th International Conference of the European Society for Precision Engineering and Nanotechnology, Bilbao, 3-7, June, 2019, Spain |
| Freie Schlagworte | topography fidelity ; instrument transfer function ; material measure ; angular-dependent asymmetries ; optical areal surface topography measurement |
| Zusammenfassung | A novel sample aimed for characterising the instrument transfer function (ITF) and angular-dependent asymmetries of areal surface topography measuring instruments has been designed, manufactured and applied. Two main innovative ideas are implemented in the sample design. Firstly, the sample is based on circular structure patterns. Such rotational symmetric patterns are preferred for characterising the ITF features in different angular directions to detect angular-dependent asymmetries. Secondly, the feature pattern of the sample is generated by rotating a horizontal linear chirp profile around the z-axis. The chirp pattern can well present a surface with a predefined band spectrum (λmin ... λmax) with a quasi-flat amplitude. In this study, a prototype sample made of Niobium on silicon and with patterns in a spectral range λmin = 1 μm ... λmax= 16.0 μm was fabricated by electron-beam lithography combined with reactive ion etching technique. It has non-transparent and reflecting surfaces, thus it is ideal for characterising optical measurement devices. The material composition of the top and bottom surfaces of the features are the same, thus avoiding the influence of the phase jump issue of optical reflection. The root mean squared roughness value Sq of the top and bottom feature surface is determined as 3.1 nm and 1.9 nm, respectively. 3D Atomic Force Microscopy (AFM) measurements indicate that the feature has very steep sidewalls with slight undercuts. The sample has been successfully applied in characterising the ITF and its angular-dependent asymmetries of a commercial laser scanning confocal microscopy (LSCM) with an 100x objective, showing promising results. |
| Themenbereich der Metrologie | Nanometrologie |
Zitierung
Dai, G., Seeger, B., Weimann, T., Xie, W., Hüser, D., & Tutsch, R. (2019). Development of a novel material measure for characterising instrument transfer function (ITF) considering angular-dependent asymmetries of areal surface topography measuring instruments. 19th International Conference of the European Society for Precision Engineering and Nanotechnology, Bilbao, 3-7, June, 2019, Spain.