| Zugriffsnummer | 42233 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with grazing-incidence small-angle x-ray scattering |
| Autor(in); Institution |
Pflüger, Mika; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Xavier, Jolly; Helmholtz-Zentrum Berlin (HZB), Berlin, GERMANY
Probst, Jürgen; Helmholtz-Zentrum Berlin (HZB), Berlin, GERMANY
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Becker, Christian; Helmholtz-Zentrum Berlin (HZB), Berlin, GERMANY
Krumrey, Michael; 7.2, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Journal of Applied Crystallography: 52 (2019), 2, 322 - 331 |
| ISSN | 0021-8898 (PRINT) ; 1600-5767 (ONLINE) |
| DOI | |
| URL | |
| Verlag | Oxford: Blackwell |
| Zusammenfassung | In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm×15 mm on photonic structures produce by nanoimprint lithography. The photonic structures are composed of crystalline and locally quasicrystalline two-dimensional patterns with structure sizes between about 100 nm and 10 μm to enable broadband visible light absorption for use in solar energy harvesting. These first GISAXS measurements on locally quasicrystalline samples demonstrate that GISAXS is capable of showing the locally quasicrystalline nature of the samples while at the same time revealing the long-range periodicity introduced due to the lattice design. We describe the scattering qualitatively in the framework of the distorted wave Born approximation using a hierarchical model mirroring the sample design, which consists of a rectangular and locally quasicrystalline supercell which is repeated periodically to fill the whole surface. The nanoimprinted samples are compared to a sample manufactured using electron beam lithography and the distortions of the periodic and locally quasiperiodic samples are quantified statistically. Due to the high sensitivity of GISAXS to deviations from the perfect lattice, the misalignment of the crystallographic axes was measured with a resolution of 0.015°, showing distortions up to ±0.15° in the investigated samples. |
| Kostenfreier Zugang | Open Access Hybrid |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Pflüger, M., Soltwisch, V., Xavier, J., Probst, J., Scholze, F., Becker, C., & Krumrey, M. (2019). Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with grazing-incidence small-angle x-ray scattering. Journal of Applied Crystallography, 52(2), 322–331. https://doi.org/10.1107/s1600576719001080