| Zugriffsnummer | 41972 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Micro Coordinate Measurement Machine (μCMM) using voice coil actuator with interferometric position feedback |
| Autor(in); Institution |
Yu, Liang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig; Harbin Institute of Technology, Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin, CHINA
Molnar, Gabor; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bütefisch, Sebastian; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Werner, Christian; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Tenth International Symposium on Precision Engineering Measurements and Instrumentation:(2019), 1 - 6 |
| Artikelnummer | 110531S |
| Schriftenreihe | Proceedings of SPIE: 11053 |
| ISSN | 0277-786X (PRINT) ; 1996-756X (ONLINE) |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), Kunming, 8-10, August, 2018, China |
| Freie Schlagworte | interferometer ; interferometry ; displacement measurement ; optical metrology ; positioning stages ; coordinate metrology ; coordinate measuring machines ; CMM ; micro metrology ; nano metrology ; Field Programmable Gate Array (FPGA) ; voice coil actuator |
| Zusammenfassung | Quantitative determination of dimensional properties like length, diameter, height, etc. is essential in research, development and in production process control. To meet these requirements, the widely used approach is the coordinate measurement technique. The equipments - the coordinate measuring machines (CMMs) - using the mentioned technique cover a wide measurement range from metre to nanometre. Below a newly developed equipment for the micro scale is presented. The system - the micro coordinate measuring machines (μCMM) - consists of a probing system, voice coil based actuators and an integrated interferometric measurement system. The key component - in addition to the probing system - is the positioning stage, since the characteristics of the position acquisition and control directly influences the achievable accuracy of the complete measurement system. In contrast to a standard interferometer the presented system utilizes a 2D CMOS image sensor to capture the measurement signal. To drive the stage, a commercial voice coil actuator is used: the scanning range of the introduced system covers about 15 mm, and can be easily extended. The applied probing system uses a ruby ball stylus probe. It is a measuring probe, which means that it provides a signal corresponding to the occurring deflections of the probe ball for all three spatial directions. The probe achieves nanometer resolution. |
| Themenbereich der Metrologie | Nanometrologie |
Zitierung
Yu, L., Molnar, G., Bütefisch, S., Werner, C., Meeß, R., Danzebrink, H.-U., & Flügge, J. (2019). Micro Coordinate Measurement Machine (μCMM) using voice coil actuator with interferometric position feedback. 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), Kunming, 8-10, August, 2018, China. https://doi.org/10.1117/12.2511527