| Zugriffsnummer | 41971 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Form determination of optical surfaces by measuring the spatial coherence function using shearing interferometry |
| Autor(in); Institution |
Hagemann, Jan-Hendrik; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Falldorf, Claas; Bremer Institut für angewandte Strahltechnik GmbH (BIAS), Bremen, GERMANY
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Bergmann, Ralf B.; Bremer Institut für angewandte Strahltechnik GmbH (BIAS), Bremen, GERMANY; University of Bremen, Faculty 01: Physics and Electrical Engineering and MAPEX, Bremen, GERMANY
|
| Quelle/Jahr | Optics Express: 26 (2018), 21, 27991 - 28001 |
| Availability | [online only] |
| ISSN | 1094-4087 |
| DOI | |
| Verlag | Washington, DC: Optical Society of America |
| Klassifikationscode | OCIS: 120.3940 ; OCIS: 120.3180 ; OCIS: 030.1640 ; OCIS: 050.5082 |
| Freie Schlagworte | Metrology ; Interferometry ; Coherence ; Phase space in wave optics |
| Zusammenfassung | We present a new method for the form measurement of optical surfaces using the spatial coherence function, which enables ashearing interferometer in combination with an LED multispot illumination to function as a measurement device. A new evaluation approach connects the measured data with the surface form by inverse raytracing. First measurement results with the inverse evaluation procedures are shown. We present the whole measurement in combination with the evaluation procedure. In addition, the convergence and stability of the implemented optimization task is investigated. |
| Kostenfreier Zugang | Open Access Gold |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
| Forschungsprojekt | DFG OPAL-II, FV-42035 |
| Förderinformationen (1) |
Förderername: Deutsche Forschungsgemeinschaft (DFG)
Förderer ID: 0000 0001 2096 9829 Förderer ID Typ: ISNI Förderungsnummer: BE1924/22-2, EH400/5-2 URI der Förderung: http://gepris.dfg.de/gepris/projekt/258565427 |