| Zugriffsnummer | 41867 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Small force metrology for AFM, stylus instruments, CMM and nanoindenter |
| Autor(in); Institution |
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Li, Zhi; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Popadic, Radovan; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Hiller, Karla; Chemnitz University of Technology, Center for Microtechnologies, Chemnitz, GERMANY
Hahn, Susann; Chemnitz University of Technology, Center for Microtechnologies, Chemnitz, GERMANY
Frank, Thomas; CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, Erfurt, GERMANY
Hamdana, Gerry; Technische Universität Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY
Peiner, Erwin; Technische Universität Braunschweig, Institute of Semiconductor Technology (IHT), Braunschweig, GERMANY
Gärtner, Eva; SiMetrics GmbH, Limbach-Oberfrohna, GERMANY
Frühauf, Joachim; SiMetrics GmbH, Limbach-Oberfrohna, GERMANY
Nesterov, Vladimir; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018), Full Digest:(2018), 337 - 338 |
| ISSN | 2160-0171 (ELECTRONIC) ; 0589-1485 (POD) |
| ISBN | 978-1-5386-0974-3 (PDF) ; 978-1-5386-0973-6 (USB) ; 978-1-5386-2130-1 (PoD) |
| DOI | |
| Verlag | Piscataway, NJ: IEEE |
| Konferenzangaben | Conference on Precision Electromagnetic Measurements ; CPEM 2018, Paris, 8-13, July, 2018, France |
| Freie Schlagworte | Double spring ; Meander spring ; Probing force calibration ; Reference spring ; Stiffness calibration |
| Zusammenfassung | With the increasing spread of soft polymer products the calibration of probing forces of atomic force microscopes, stylus instruments, coordinate measuring machines and nanoindenters becomes more and more important in order not to scratch the surface of these products during quality control. New sensors and reference springs for force calibration and new calibration methods for these devices will be presented along with some comparison measurements revealing the status of force and stiffness calibration. The contribution closes with an outlook on the current status of probing force standardization. |
Zitierung
Brand, U., Li, Z., Popadic, R., Hiller, K., Hahn, S., Frank, T., Hamdana, G., Peiner, E., Gärtner, E., Frühauf, J., & Nesterov, V. (2018). Small force metrology for AFM, stylus instruments, CMM and nanoindenter. Conference on Precision Electromagnetic Measurements ; CPEM 2018, Paris, 8-13, July, 2018, France. https://doi.org/10.1109/cpem.2018.8500987