| Zugriffsnummer | 41773 |
| Dokumenttyp | Buchartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Picometre level displacement interferometry |
| Autor(in); Institution |
Andreas, Birk; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Modern Interferometry for Length Metrology: Exploring limits and novel techniques: 1 (2018), 1, 9-1 - 9-46 |
| Herausgeber(in) |
Schödel, René; 5.4, Interferometrie an an Maßverkörperungen, PTB-Braunschweig
|
| ISSN | 2053-2563 (ONLINE) ; 2054-7315 (PRINT) |
| ISBN | 978-0-7503-1576-0 ; 978-0-7503-1578-4 (PDF) ; 978-0-7503-1577-7 (mobi) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | Displacement interferometry ; Systematic errors ; Wavefront correcions |
| Zusammenfassung | This chapter first discusses the phrase 'picometre level' in front of error sources of displacement interferometers. In applications with moving ranges above 10 mm the resolution of displacements in the range of picometres is only possible with spatial and temporal averaging. Many effects must be considered to build a displacement interferometer with a resolution, stability and linearity in the picometre range. Additionally, to achieve also traceable length measurements, all relevant systematic effects must be considered. A main focus of this chapter is the assessment of the length-proportional error due to diffraction on a relative level of better than 1.10-9 |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
Zitierung
Andreas, B. & Weichert, C. (2018). Picometre level displacement interferometry. In R. Schödel (Ed.), Modern Interferometry for Length Metrology: Exploring limits and novel techniques (pp. 9-1–9-46). Bristol: IOP Publishing. https://doi.org/10.1088/2053-2563/aadddcch9