| Zugriffsnummer | 41124 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Metrological large range magnetic force microscopy |
| Autor(in); Institution |
Dai, Gaoliang; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Hu, Xiukun; 2.5, Halbleiterphysik und Magnetismus, PTB-Braunschweig
Sievers, Sibylle; 2.5, Halbleiterphysik und Magnetismus, PTB-Braunschweig
Fernandez Scarioni, Alexander; 2.5, Halbleiterphysik und Magnetismus, PTB-Braunschweig
Neu, Volker; IFW Dresden, Dresden, GERMANY
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Schumacher, Hans Werner; 2.5, Halbleiterphysik und Magnetismus, PTB-Braunschweig
|
| Quelle/Jahr | Review of Scientific Instruments: 89 (2018), 9, 1 - 9 |
| Artikelnummer | 093703 |
| ISSN | 0034-6748 (print) ; 1089-7623 (online) |
| DOI | |
| Verlag | Melville, NY: AIP |
| Zusammenfassung | A new metrological large range magnetic force microscope (Met. LR-MFM) has been developed. In its design, the scanner motion is measured by using three laser interferometers along the x, y, and z axes. Thus, the scanner position and the lift height of the MFM can be accurately and traceably determined with subnanometer accuracy, allowing accurate and traceable MFM measurements. The Met. LR-MFM has a measurement range of 25 mm × 25mm × 5mm, larger than conventional MFMs by almost three oders of magnitude. It is capable of measuring samples from the nanoscale to the macroscale, and thus, it has the potential to bridge different magnetic field measurement tools having different spatially resolved scales. Three different measurement strategies referred to as Topo&MFM, MFMXY, and MFMZ have been developed. The Topo&MFM is designed for measuring topography and MFM phase images, similar to conventional MFMs. The MFMXYdiffers from the Topo&MFM as it does not measure the topography profile of surfaces at the second and successive lines, thus reducing tip wear and saving measurement time. The MFMZ allows the imaging of the stray field in the xz- or yz-planes. A number of measurement examples on a multilayered thin film reference sample made of [Co(0.4 nm)/Pt(0.9 nm)]100 and on a patterned magnetic multilayer [Co(0.4 nm)/Pt(0.9 nm)]10 with stripes with a 9.9 μm line width and 20 μm periodicity are demonstrated, indicating excellent measurement performance. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 4.0 ; Creative Commons Attribution 4.0 License |
| Forschungsprojekt | 15SIB06: NanoMag: Nano-scale traceable magnetic field measurements |
| Förderinformationen (1) |
Förderername: European Commission (EC)
Förderer ID: 0000 0001 2242 8989 Förderer ID Typ: ISNI Förderprogramm: EMPIR 2015 SI Broader Scope Titel der Förderung: 15SIB06: NanoMag: Nano-scale traceable magnetic field measurements Förderungsnummer: 15SIB06 URI der Förderung: https://www.ptb.de/empir/nanomag.html |