| Zugriffsnummer | 41041 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Investigations of interpolation errors of angle encoders for high precision angle metrology |
| Autor(in); Institution |
Yandayan, Tanfer; TUBITAK UME, Gebze/Kocaeli, TURKEY
Geckeler, Ralf D.; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Just, Andreas; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Krause, Michael; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Akgoz, S. Asli; TUBITAK UME, Gebze/Kocaeli, TURKEY
Aksulu, Murat; TUBITAK UME, Gebze/Kocaeli, TURKEY
Grubert, Bernd; MÖLLER-WEDEL OPTICAL GmbH, Wedel, GERMANY
Watanabe, Tsukasa; National Metrology Institute of Japan (NMIJ, AIST), Tsukuba, JAPAN
|
| Quelle/Jahr | Measurement Science and Technology: 29 (2018), 6, 1 - 15 |
| Artikelnummer | 064007 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publishing |
| Freie Schlagworte | SI angle unit radian ; autocollimators ; angle encoders ; interpolation errors |
| Zusammenfassung | Interpolation errors at small angular scales are caused by the subdivision of the angular interval between adjacent grating lines into smaller intervals when radial gratings are used in angle encoders. They are often a major error source in precision angle metrology and novel approaches for determining them at low levels of uncertainty are needed. Extensive investigations of interpolation errors of different angle encoders with various interpolators and interpolation schemes were carried out by adapting the shearing method to the calibration of autocollimators with angle encoders. The results of the National Metrology Institutes (NMI) of Germany (PTB), of Turkey (TUBITAK UME), of Japan (AIST NMIJ), and of the autocollimator manufacturer MOELLER-WEDEL OPTICAL (MWO) are presented which were acquired by use of four different high precision angle encoders/interpolators/rotary tables. State of the art uncertainties down to 1 milliarcsec (5 nrad) were achieved for the determination of the interpolation errors using the shearing method which provides simultaneous access to the angle deviations of the autocollimator and of the angle encoder. Compared to the calibration and measurement capabilities (CMC) of the participants for autocollimators, the use of the shearing technique represents a substantial improvement in the uncertainty by a factor of up to 5 in addition to the precise determination of interpolation errors or their residuals (when compensated). The discussion of the results is carried out in conjunction with the equipment used. |
| Themenbereich der Metrologie | Länge, dimensionelle Metrologie |
Zitierung
Yandayan, T., Geckeler, R. D., Just, A., Krause, M., Akgoz, S. A., Aksulu, M., Grubert, B., & Watanabe, T. (2018). Investigations of interpolation errors of angle encoders for high precision angle metrology. Measurement Science and Technology, 29(6), 1–15. https://doi.org/10.1088/1361-6501/aabef6