| Zugriffsnummer | 40804 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | 110 GHz on-wafer measurement comparison on alumina substrate |
| Autor(in); Institution |
Probst, Thorsten; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Dörner, Ralf; Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik - FBH, Berlin, GERMANY
Ohlrogge, Matthias; Fraunhofer-Institut für Angewandte Festkörperphysik - IAF, Freiburg i.Br., GERMANY
Lozar, Roger; Fraunhofer-Institut für Angewandte Festkörperphysik - IAF, Freiburg i.Br., GERMANY
Arz, Uwe; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
|
| Quelle/Jahr | 2017 90th ARFTG Microwave Measurement Symposium (ARFTG):(2018), 1 - 4 |
| ISBN | 978-1-5386-4356-3 (PDF) ; 978-1-5386-4355-6 (USB) ; 978-1-5386-4357-0 (PoD) |
| DOI | |
| Verlag | Piscataway, NJ: IEEE |
| Konferenzangaben | 90th ARFTG Microwave Measurement Symposium, Boulder, Colo., 28, November - 1, December, 2017, USA |
| Freie Schlagworte | on-wafer ; calibration ; substrate ; probes |
| Zusammenfassung | This paper reports on initial results of a three-party on-wafer measurement comparison carried out on a custom-made alumina calibration substrate in the frequency range up to 110 GHz. The correction of the vector network analyzer measurement is done with the highly accurate multiline TRL (mTRL) calibration. The focus of the investigation is on the influence of the measurement system, the probe geometry and operator skills. The results of the calibrations are presented and the influence on selected devices under tests (DUT) are evaluated for different measurement configurations. |
| Themenbereich der Metrologie | Elektrizität und Magnetismus |
Zitierung
Probst, T., Dörner, R., Ohlrogge, M., Lozar, R., & Arz, U. (2018). 110 GHz on-wafer measurement comparison on alumina substrate. 90th ARFTG Microwave Measurement Symposium, Boulder, Colo., 28, November - 1, December, 2017, USA. https://doi.org/10.1109/arftg.2017.8255867