Performance of the bent beam ionization gauge in ultrahigh vacuum measurements

Han, S.-W.; Jitschin, Wolfgang; Röhl, Peter; Grosse, Gottfried

doi:https://doi.org/10.1016/0042-207x(88)90003-6

Zugriffsnummer	40523
Dokumenttyp	Zeitschriftenartikel
Peer Review	unbekannt
Sprache	Englisch
Titel	Performance of the bent beam ionization gauge in ultrahigh vacuum measurements
Autor(in); Institution	Han, S.-W.; Korea Standards Research Institute, Taejon, Ch’ung- nam, REPUBLIC OF KOREA Jitschin, Wolfgang; 9.24, Vakuumphysik, PTB-Berlin Röhl, Peter; 9.24, Vakuumphysik, PTB-Berlin Grosse, Gottfried; 9.24, Vakuumphysik, PTB-Berlin
Quelle/Jahr	Vacuum: 38 (1988), 12, 1079 - 1082
ISSN	0042-2266
DOI	https://doi.org/10.1016/0042-207x(88)90003-6
Verlag	Amsterdam: Elsevier
Zusammenfassung	The characteristics of a commercial bent beam ionization gauge have been investigated. The dependencies of ion collector current on electron emission current, electron energy and deflector field strength are reported; the ionization gauge coefficient varies significantly with emission current. The lower limit of pressure measurements is restricted by two effects, i.e. the X-ray limit which is < 4 × 10⁻¹¹ Pa and the filament evaporation limit which amounts to ˜ 6 × 10⁻¹¹ Pa nitrogen equivalent pressure at the recommended operating conditions. The filament evaporation can be reduced by operating the gauge at a smaller emission current. Thereby the gauge becomes suitable for measurements of vacuum pressures in the 10⁻¹¹ Pa range.

Zitierung

Han, S.-W., Jitschin, W., Röhl, P., & Grosse, G. (1988). Performance of the bent beam ionization gauge in ultrahigh vacuum measurements. Vacuum, 38(12), 1079–1082. https://doi.org/10.1016/0042-207x(88)90003-6

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