| Zugriffsnummer | 40445 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | A new sensor for one-dimensional tactile measurements with the Nanometer Comparator [poster] |
| Autor(in); Institution |
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bütefisch, Sebastian; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology:(2018), 513 - 514 |
| Herausgeber(in) |
Billington, D.
|
| ISBN | 978-0-9957751-2-1 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 18th International Conference of the European Society for Precision Engineering and Nanotechnology, Venice, 04-08, June, 2018, Italy |
| Freie Schlagworte | tactile sensor ; interferometry ; calibration ; step gauge |
| Zusammenfassung | We report on the development of a tactile sensor on a silicon flexure whose deflection is measured with two fibre interferometers. It will be used to realize one-dimensional tactile measurements, like step gauge calibrations, with the Nanometer Comparator of PTB. For repetitively probing a face of a gauge block, a standard deviation of less than 7 nm was achieved. |
| Themenbereich der Metrologie | Nanometrologie |
Zitierung
Weichert, C., Bütefisch, S., Köning, R., & Flügge, J. (2018). A new sensor for one-dimensional tactile measurements with the Nanometer Comparator [poster]. 18th International Conference of the European Society for Precision Engineering and Nanotechnology, Venice, 04-08, June, 2018, Italy.