| Zugriffsnummer | 40438 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Calibration of a spinning rotor gas friction gauge against a fundamental vacuum pressure standard |
| Autor(in); Institution |
Comsa, George; Institut für Grenzflächenforschung and Vakuumphysik der Kernforschungsanlage Jülich GmBH, Jülich, GERMANY
Fremerey, J. K.; Institut für Grenzflächenforschung and Vakuumphysik der Kernforschungsanlage Jülich GmBH, Jülich, GERMANY
Lindenau, B.; Institut für Grenzflächenforschung and Vakuumphysik der Kernforschungsanlage Jülich GmBH, Jülich, GERMANY
Messer, Günter; 9.23, Vakuumphysik, PTB-Berlin
Röhl, Peter; 9.23, Vakuumphysik, PTB-Berlin
|
| Quelle/Jahr | Journal of Vacuum Science and Technology: 17 (1980), 2, 642 - 644 |
| ISSN | 0022-5355 |
| DOI | |
| Verlag | New York, NY: AIP |
| Zusammenfassung | The paper reports the direct calibration of a spinning rotor gas friction gauge (RG) against the multiple expansion vacuum pressure standard of the Physikalisch‐Technische Bundesanstalt (PTB), Berlin, with HE, Ne, Ar, Kr, Xe, CH4, N2, and, via a membrane micromanometer, with H2, O2, CO, and CO2. It was found that in the pressure range 10−5–10−2 mbar (10−7–10−4 Pa) the macroscopic coefficient of tangential momentum transfer between gas molecules and the rotor surface, σ, is close to unity. The long term reproducibility of the new RG at p≳10−5 mbar as observed over two years with long intermediate periods of air exposure was within the limits of the total uncertainty of 1% for the comparison with the PTB standard. The RG thus seems recommendable for use as a reliable transfer standard, all the more since the only constituent of the new instrument that must be transferred is a small (typically 4.5‐mm‐diam) steel ball. |
| Themenbereich der Metrologie | Thermometrie |