Experiences with cryopumps in calibration devices

Grosse, Gottfried; Messer, Günter

doi:https://doi.org/10.1016/s0042-207x(70)80036-7

Zugriffsnummer	40432
Dokumenttyp	Zeitschriftenartikel
Peer Review	unbekannt
Sprache	Englisch
Titel	Experiences with cryopumps in calibration devices
Autor(in); Institution	Grosse, Gottfried; 7.23, Vakuumphysik, PTB-Berlin Messer, Günter; 7.23, Vakuumphysik, PTB-Berlin
Quelle/Jahr	Vacuum: 20 (1970), 9, 373 - 376
ISSN	0042-207X
DOI	https://doi.org/10.1016/s0042-207x(70)80036-7
Verlag	Amsterdam: Elsevier
Zusammenfassung	A room-temperature calibration system is described in which calibrating pressures between 10P⁹ and 10⁵ torr are maintained by a helium evaporator cryopump with a liquid helium consumption of 2–3 litres/hour. The major advantage of this system is that, due to the high pumping speed of the cryopump, an orifice of relatively large conductance (100 litres/sec) may be used. Hydrogen background pressures of 10¹⁰ torr may be maintained for a sufficient time to permit the use of all test gases except helium and hydrogen.

Themenbereich der Metrologie

Thermometrie

Zitierung

Grosse, G. & Messer, G. (1970). Experiences with cryopumps in calibration devices. Vacuum, 20(9), 373–376. https://doi.org/10.1016/s0042-207x(70)80036-7

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