Zugriffsnummer 40396
Dokumenttyp Zeitschriftenartikel Open Access Hybrid
Peer Review mit Peer Review
Sprache Englisch
Titel Interlaboratory comparison measurements of aspheres
Autor(in); Institution
Schachtschneider, Reyko; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Fortmeier, Ines; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Stavridis, Manuel; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Asfour, J.; Dioptik GmbH, Weinheim, GERMANY
Berger, G.; AMETEK GmbH, Weiterstadt, GERMANY
Bergmann, R. B.; Bremer Institut für Angewandte Strahltechnik (BIAS) GmbH, Bremen, GERMANY
Beutler, A.; Mahr GmbH, Göttingen, GERMANY
Blümel, T.; Trioptics Berlin GmbH, Berlin, GERMANY
Klawitter, Heiko; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Kubo, K.; Panasonic Production Engineering Co.,k Ltd., Osaka, JAPAN
Liebl, J.; Hochschule für angewandte Wissenschaften - Fachhochschule Deggendorf, Teisnach, GERMANY
Löffler, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Pruss, C.; Universität Stuttgart, Inst.für Technische Optik, Stuttgart, GERMANY
Ramm, D.; Panasonic Automotive and Industrial Systems Europe GmbH, Langen, GERMANY
Sandner, M.; Now at mevisco GmbH and Co. KG, Bremen, GERMANY
Schneider, G.; CC UPOB e.V., Braunschweig, GERMANY
Wendel, M.; AMETEK GmbH, Weiterstadt, GERMANY
Widdershoven, I.; IBS Precision Engineering, Eindhoven, NETHERLANDS
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Quelle/Jahr Measurement Science and Technology: 29 (2018), 1 - 13
Artikelnummer 055010
ISSN 0957-0233 (PRINT) ; 1361-6501 (ONLINE)
DOI
Verlag Bristol: IOP Publishing
Freie Schlagworte metrology ; aspheres ; interlaboratory comparison
Zusammenfassung The need for high-quality aspheres is rapidly growing, necessitating increased accuracy in their measurement. A reliable uncertainty assessment of asphere form measurement techniques is difficult due to their complexity. In order to explore the accuracy of current asphere form measurement techniques, an interlaboratory comparison was carried out in which four aspheres were measured by eight laboratories using tactile measurements, optical point measurements, and optical areal measurements. Altogether, 12 different devices were employed. The measurement results were analysed after subtracting the design topography and subsequently a best-fit sphere from the measurements. The surface reduced in this way was compared to a reference topography that was obtained by taking the pointwise median across the ensemble of reduced topographies on a 1000 × 1000 Cartesian grid. The deviations of the reduced topographies from the reference topography were analysed in terms of several characteristics including peak-to-valley and root-mean-square deviations. Root-mean-square deviations of the reduced topographies from the reference topographies were found to be on the order of some tens of nanometres up to 89 nm, with most of the deviations being smaller than 20 nm. Our results give an indication of the accuracy that can currently be expected in form measurements of aspheres.
Kostenfreier Zugang Open Access Hybrid
Rechteinformation CC BY 3.0 ; Creative Commons Attribution 3.0 License
Themenbereich der Metrologie Mathematik und metrologische Informationstechnik
Forschungsprojekt Wissenschaftliche Zusammenarbeit auf dem Gebiet Auswertung und Veröffentlichung eines Asphären-Messvergleichs

Zitierung

Schachtschneider, R., Fortmeier, I., Stavridis, M., Asfour, J., Berger, G., Bergmann, R. B., Beutler, A., Blümel, T., Klawitter, H., Kubo, K., Liebl, J., Löffler, F., Meeß, R., Pruss, C., Ramm, D., Sandner, M., Schneider, G., Wendel, M., Widdershoven, I., Schulz, M., & Elster, C. (2018). Interlaboratory comparison measurements of aspheres. Measurement Science and Technology, 29, 1–13. https://doi.org/10.1088/1361-6501/aaae96

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