| Zugriffsnummer | 40100 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Multi-dimensional grating interferometer based on fibre-fed measurement heads arranged in Littrow configuration |
| Autor(in); Institution |
Siaudinyte, Lauryna; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Molnar, Gabor; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Koening, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 29 (2018), 5, 1 - 6 |
| Artikelnummer | 054007 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publ. |
| Konferenzangaben | 3rd MacroScale 2017: Dimensional and related measurements at the macroscopic scale, Espoo, 17-19, October, 2017, Finland |
| Freie Schlagworte | interferometric encoder ; Littrow configuration ; displacement measurement ; diffraction ; grating interferometer ; multidimensional measurement |
| Zusammenfassung | Industrial application versatility of interferometric encoders increases the urge to measure several degrees of freedom. A novel grating interferometer containing commercially available minimized Michelson interferometer and three fibre-fed measurement heads is presented in the paper. Moreover, the arrangement is designed for simultaneous displacement measurements in two perpendicular planes. In the proposed setup, beam splitters are located in fibre heads, therefore, grating is separated from the light source and the photo detector which influence measurement results by generated heat. Operating principle of proposed system as well as error sources influencing measurement results are discussed in this paper. Benefits and shortcomings of the setup are presented within the paper. Simple Littrow configuration based design leads to the compact size interferometric encoder suitable for multidimensional measurements. |
