| Zugriffsnummer | 39573 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | X-ray interferometry [invited lecture] |
| Autor(in); Institution |
Yacoot, Andrew; National Physical Laboratory (NPL), Teddington, UK
Kuetgens, Ulrich; 4.3, Quantenoptik und Längeneinheit, PTB-Braunschweig
|
| Quelle/Jahr | Nanocon 2011: Conference proceedings:(2011), 1 - 7 |
| Availability | [CD-ROM] ; file name: 1086.pdf |
| ISBN | 978-80-87294-23-9 |
| Verlag | Ostrava: Tanger |
| Konferenzangaben | 3rd NANOCON, Brno, 21-23, September, 2011, Czech Republic |
| Freie Schlagworte | x-ray interferometry ; optical interferometry ; nanometrology |
| Zusammenfassung | Within the European Metrology Research Programme funded project NANOTRACE, the non-linearity of the next generation of optical interferometers has been measured using x-ray interferometry. The x-ray interferometer can be regarded as a ruler or translation stage whose graduations or displacement steps are based on the lattice spacing of the crystallographic planes from which the x-rays are diffracted, in this case 0.192 nm corresponding to the (220) planes in silicon. Precise displacement of the x-ray interferometer’s monolithic translation stage in steps corresponding to discrete numbers of x-ray fringes requires servo positioning capability at the picometre level. To achieve this very fine control, a digital control system has been developed which has opened up the potential for advances in metrology using x-ray interferometry that include quadrature counting of x-ray fringes. |
