| Zugriffsnummer | 39357 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Predictable quantum efficient detectorbased on n-type silicon photodiodes |
| Autor(in); Institution |
Dönsberg, Timo; Aalto University, Espoo, FINLAND
Manoocheri, Farshid; Aalto University, Espoo, FINLAND
Sildoja, Meelis; 4.1, Photometrie und angewandte Radiometrie, PTB-Braunschweig; Aalto University, Espoo, FINLAND
Juntunen, Mikko; Aalto University, Espoo, FINLAND; Institute of Physics, University of Helsinki, Helsinki, FINLAND
Tuovinen, Esa; VTT Technical Research Centre of Finland Ltd., Espoo, FINLAND
Ronkainen, Hannu; VTT Technical Research Centre of Finland Ltd., Espoo, FINLAND
Prunnila, Mika; VTT Technical Research Centre of Finland Ltd., Espoo, FINLAND
Merimaa, Mikko; VTT Technical Research Centre of Finland Ltd., Espoo, FINLAND
Tang, Chi Kwong; Justervesenet (JV), Kjeller, NORWAY
Gran, Jarle; Justervesenet (JV), Kjeller, NORWAY
Müller, Ingmar; 7.3, Detektorradiometrie und Strahlungsthermometrie, PTB-Berlin
Werner, Lutz; 7.3, Detektorradiometrie und Strahlungsthermometrie, PTB-Berlin
Rougie, Bernard; Laboratoire Vommun de Métrologie (LNE-CNAM), La Plaine - Saint Denis, FRANCE
Pons, Alicia; Agencia Estatal Consejo Superior de Investigaciones Cientificas (CSIC), Madrid, SPAIN
Smid, Marek; Cesky metrologicky institute (CMI), Praha, CZECH REPUBLIC
Gal, Peter; Magyar Kereskedelmi Engedelyezesi Hivatal (MKEH), Budapest, HUNGARY
Lolli, Lapo; Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, ITALY
Brida, Giorgio; Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, ITALY
Rastello, Maria Luisa; Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, ITALY
Ikonen, Erkki; Aalto University, Espoo, FINLAND; VTT Technical Research Centre of Finland Ltd., Espoo, FINLAND
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| Quelle/Jahr | 13th International Conference on New Developments and Applications in Optical Radiometry (NEWRAD 2017): Proceedings:(2017), 132 - 133 |
| Availability | [USB-Stick] |
| Verlag | [s.l.]: |
| Konferenzangaben | NEWRAD 2017: 13th International Conference on New Developments and Applications in Optical Radiometry, Tokio, 13-16 June 2017, Japan |
| Zusammenfassung | We have designed, manufactured, modelled and characterized a new type of predictable quantum efficient detector (PQED) based on n-type induced junction photodiodes. The photodiodes utilize an Al2O3 layer grown on top of n-type silicon substrate using atomic layer deposition. Two sets of photodiodes with varying doping concentrations were fabricated. For both sets, the modelled and measured responsivities were congruent within the measurement and modelling uncertainties of around 100 ppm. Thus, the new design is a good alternative to the existing PQEDs, where p-type silicon and a thermally grown SiO2 layer are used. A novel experimental method was developed to obtain values of the 3D model parameters giving increased credibility to the PQED as a primary standard. |
Zitierung
Dönsberg, T., Manoocheri, F., Sildoja, M., Juntunen, M., Tuovinen, E., Ronkainen, H., Prunnila, M., Merimaa, M., Tang, C. K., Gran, J., Müller, I., Werner, L., Rougie, B., Pons, A., Smid, M., Gal, P., Lolli, L., Brida, G., Rastello, M. L., & Ikonen, E. (2017). Predictable quantum efficient detectorbased on n-type silicon photodiodes. NEWRAD 2017: 13th International Conference on New Developments and Applications in Optical Radiometry, Tokio, 13-16 June 2017, Japan.