| Zugriffsnummer | 39253 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Manufacturing of substrates for curved deterministic areal roughness standards |
| Autor(in); Institution |
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Hemmleb, Matthias; m2c calibration, Potsdam, GERMANY
Dziomba, Thorsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Neuschaefer-Rube, Ulrich; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology:(2017), 251 - 252 |
| Herausgeber(in) |
Billington, D.
|
| ISBN | 978-0-9957751-0-7 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | euspen's 17th International Conference & Exhibition, Hannover, 29, May - 02, June, 2017, Germany |
| Freie Schlagworte | Ultra-precision machining ; focused ion beam ; polishing ; AFM ; optical measurement |
| Zusammenfassung | Deterministic roughness standards for stylus instruments can e.g. be fully manufactured by ultra-precise turning. The roughness profile is deduced from linescans in the radial direction on such a turned disc. Deterministic areal roughness standards on surfaces with curvatures below 1 mm are, however, more difficult to produce due to the spatial arrangement. In the approach followed in this project, the deterministic roughness is therefore created by focused ion beam (FIB) processing. As a prerequisite, the specimen surfaces need to be significantly smoother than the roughness to be written subsequently by the FIB method. In this study, the manufacturing chains for specimens with optical surface quality and different kinds of curvatures are presented. In a first step, a nickel-phosphorus coating was found to be a suitable substrate material for FIB processing, which generates fields of 290 μm × 290 μm with roughness values in the range of 2 nm < Sq < 300 nm. Cylindrical bodies with a radius of approx. 400 μm and spherical bodies with a radius of approx. 600 µm are manufactured as well as correlating convex and concave toric surface elements. Diamond turning is applied for toric surfaces. For the manufacturing of the small spherical and cylindrical surfaces, polishing procedures with suitable pads and kinematics are developed. Atomic force microscopy (AFM) and confocal laser scanning microscopy (CLSM) are used for surface characterization. |
