| Zugriffsnummer | 39250 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | A multi-functional MEMS-SPM for quantitative characterization of nano-objects |
| Autor(in); Institution |
Li, Zhi; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Gao, Sai; 5.4, Interferometrie an Maßverkörperungen, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Hiller, Karla; TU Chemnitz, Chemnitz, GERMANY
Wollschläger, Nicole; Bundesamt für Materialforschung und -prüfung (BAM), Berlin, GERMANY
Zhang, Xianghui; Universität Bielefeld, Fakultät für Physik, Bielefeld, GERMANY
|
| Quelle/Jahr | Smart sensors, actuators, and MEMS VIII:(2017), 102460J-1 - 102460J-8 |
| Schriftenreihe | Proceedings of SPIE: 10246 |
| Herausgeber(in) |
Fonseca, Luis
|
| ISBN | 978-1-5106-0993-8 ; 978-1-5106-0994-5 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Smart Sensors, Actuators, and MEMS VIII, Barcelona, 08-10, May, 2017, Spain |
| Freie Schlagworte | Microelectromechanical system (MEMS) ; Atomic force microscopy (AFM) ; Scanning probe microscopy (SPM) ; Nanoforce transducer ; Nanodimensional measurement ; Nanomechanical testing |
| Zusammenfassung | Based upon the micro-fabrication technology, a series of MEMS scanning probe microscopes (MEMS-SPM) have been developed in the national metrology institute Physikalisch-Technische Bundesanstalt (PTB) in Braunschweig. In comparison with conventionally usedAFMs, the MEMS-SPM head features a vertical deflection up to 10 μm with subnanometric resolution, a non-linearity less than 0.03% and a testing force up to several hundreds of µN with a force resolution down to 1 nN by means of a capacitive displacement sensing technique. In result, these MEMS-SPMs can be successfully applied in the field of nanodimensional and nanomechanical metrology. The design of the MEMS-SPM is reported as well as first measurements using a prototype of the MEMS-SPM are described in detail in this manuscript, verifying both the proof-of-principle and possible capabilities of the MEMS-SPM. |
Zitierung
Li, Z., Gao, S., Brand, U., Hiller, K., Wollschläger, N., & Zhang, X. (2017). A multi-functional MEMS-SPM for quantitative characterization of nano-objects. Smart Sensors, Actuators, and MEMS VIII, Barcelona, 08-10, May, 2017, Spain. https://doi.org/10.1117/12.2265680