| Zugriffsnummer | 38893 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | A differential interferometric heterodyne encoder with 30 picometerperiodic nonlinearity and sub-nanometer stability |
| Autor(in); Institution |
Guan, Jun; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köchert, Paul; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Lauryna, Siaudinyte; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Jens, Flügge; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Precision Engineering: 50 (2017), 114 - 118 |
| ISSN | 0141-6359 |
| DOI | |
| Verlag | Amsterdam: Elsevier |
| Freie Schlagworte | Displacement measurement ; Interferometric heterodyne encoder ; Periodic nonlinearity ; fiber-fed encoder |
| Zusammenfassung | A differential interferometric heterodyne encoder with spatially separated input beams was developed to minimize periodic nonlinearities resulting from polarization mixing. The laser beams with different frequencies were delivered by two polarization-maintaining fibers to the encoder head. Under laboratory conditions this encoder demonstrated a system stability of 38 pm (standard deviation) and 100 pm over 30 s and 1 h respectively. In a comparison measurement with a differential heterodyne interferometer, this encoder showed periodic nonlinearities of less than 30 pm without any additional correction. |
Zitierung
Guan, J., Köchert, P., Weichert, C., Köning, R., Lauryna, S., & Jens, F. (2017). A differential interferometric heterodyne encoder with 30 picometerperiodic nonlinearity and sub-nanometer stability. Precision Engineering, 50, 114–118. https://doi.org/10.1016/j.precisioneng.2017.04.019