| Zugriffsnummer | 38782 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution |
| Autor(in); Institution |
Li, Zhi; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Wolff, Helmut; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Puranto, Prabowo; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Yacoot, Andrew; National Physical Laboratory (NPL), Teddington, UK
|
| Quelle/Jahr | Optical Measurement Systems for Industrial Inspection X: 10329 (2017), 1032944-1 - 1032944-9 |
| Schriftenreihe | Proceedings of SPIE: 10329 |
| Herausgeber(in) |
Lehmann, Peter
|
| ISBN | 978-1-5106-1103-0 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Optical Measurement Systems for Industrial Inspection X, Munich, 25-29, June, 2017, Germany |
| Freie Schlagworte | Calibration ; Data acquisition ; Field programmable gate arrays ; Interferometers ; Mirrors ; Modulation |
| Zusammenfassung | A traceable calibration setup for investigation of the quasi-static and the dynamic performance of nano-positioning stages is detailed, which utilizes a differential plane-mirror interferometer with double-pass configuration from the National Physical Laboratory (NPL). An NPL-developed FPGA-based interferometric data acquisition and decoding system has been used to enable traceable quasi-static calibration of nano-positioning stages with high resolution. A lockin based modulation technique is further introduced to quantitatively calibrate the dynamic response of moving stages with a bandwidth up to 100 kHz and picometer resolution. First experimental results have proven that the calibration setup can achieve under nearly open-air conditions a noise floor lower than 10 pm/sqrt(Hz). A pico-positioning stage, that is used for nanoindentation with indentation depths down to a few picometers, has been characterized with this calibration setup. |
Zitierung
Li, Z., Brand, U., Wolff, H., Koenders, L., Puranto, P., & Yacoot, A. (2017). Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution. SPIE Optical Measurement Systems for Industrial Inspection X, Munich, 25-29, June, 2017, Germany. https://doi.org/10.1117/12.2270262