| Zugriffsnummer | 38400 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Nanometrology at the PTB |
| Autor(in); Institution |
Kunzmann, Horst; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Metrologia: 28 (1991), 6, 443 - 453 |
| ISSN | 0026-1394 |
| DOI | |
| Verlag | Bristol: IOP Publ. |
| Zusammenfassung | The Physikalisch-Technische Bundesanstalt (PTB) is engaged in a range of projects which call for dimensional precision of order 1 nm. These include research an development (i) to inprove linear and angular displacement metrology ; (ii) to investigate the physical interaction of high resolution probes with technical surfaces and microstructures and so to represent the microtopography, form and dimension of measures. The limits vary with application and technology. Currently, only one-dimensional displacement measurements and microtopography provide the level of accuracy for which figures in the sub-nanometre range can be given. For the measurement of form and dimension of volumetric standards, barriers have still to be recognized around 10 nm. The application of single-crystal silicon devices for different length and angle measurements with nanometre and nanorad accuracy is of particular interest for the PTB. |
