| Zugriffsnummer | 38337 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Recent results of micro geometry measurements using Werth 3D Fibre Probe |
| Autor(in); Institution |
Schlie, Jakob; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Neugebauer, Michael; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology:(2017), 79 - 80 |
| Herausgeber(in) |
Billington, D.
|
| ISBN | 978-0-9957751-0-7 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | euspen's 17th International Conference & Exhibition, Hannover, 29, May -02, June, 2017, Germany |
| Freie Schlagworte | Fibre probe ; micro CMM ; probing force ; micro geometries |
| Zusammenfassung | Measurements and calibrations of high precision micro geometries or soft materials are becoming more and more necessary in modern industrial processes. In this paper, the results of measurements of micro calottes using a Werth VideoCheck UA CMM equipped with a 3D fibre probe are shown. The fibre probe enables measurements with probing forces less than 0.1 mN and the use of stylus tips down to 25 μm. The results using probes with 100 µm and 250 μm tip diameters show that the measurements of the calottes coincide with the reference values of Zeiss F25 with respect to the stated uncertainties. The results also meet the expectation that high precision measurements of even smaller objects are possible using fibre probes with tip diameters down to 25 μm. |
