| Zugriffsnummer | 38145 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Accurate thin film multijunction thermal converter on a silicon chip |
| Autor(in); Institution |
Klonz, Manfred; 2.33, Elektrizitätszähler, PTB-Braunschweig
Weimann, Thomas; 2.33, Elektrizitätszähler, PTB-Braunschweig
|
| Quelle/Jahr | CPEM'88 digest, 1988 Conference on Precision Electromagnetic Measurements:(1988), 215 - 216 |
| Herausgeber(in) |
Suematsu, Yasuharu
|
| Verlag | New York, NY: IEEE |
| Konferenzangaben | Conference on Precision Electromagnetic Measurements (CPEM) 1988, Tsukuba, 07-10, June, 1988, Japan |
| Zusammenfassung | The design of a planar thin film multijunction thermal converter (MJTC) on a silicon chip containing a window with a SiO2-membrane for low heat conductance underneath of the thermal element offers the possibility of the mass production of MJTCs with typical relative ac-dc transfer uncertainties of a few parts in 107. |
