Zugriffsnummer 38126
Dokumenttyp Konferenzartikel
Sprache Englisch
Titel Increasing the time-constant of a thin film multijunction thermal converter for low frequency application
Autor(in); Institution
Klonz, Manfred; 2.43, Thermoelektrische Sensoren, PTB-Braunschweig
Weimann, Thomas; 2.24, Dünnschichtstrukturen, PTB-Braunschweig
Quelle/Jahr CPEM '90 digest ; June 11 - 14 juin 1990, Ottawa, Canada:(1990), 134 - 135
Herausgeber(in)
Hanes, Gary R.
Verlag New York, NY: IEEE
Konferenzangaben Conference on Precision Electromagnetic Measurements (CPEM) 1990, Ottawa, 11-14, June, 1990, Canada
Zusammenfassung To optimize the planar thin film multijunction thermal converter (MJTC) developed in PTB for low frequency application a thernal mass is added in the heater area to increase the time-constant of the MJTC from 100 ms to 3 s and more. The thermal mass of silicon is left under the heater during the anisotropical etching process.

Zitierung

Klonz, M. & Weimann, T. (1990). Increasing the time-constant of a thin film multijunction thermal converter for low frequency application. Conference on Precision Electromagnetic Measurements (CPEM) 1990, Ottawa, 11-14, June, 1990, Canada.

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