| Zugriffsnummer | 38126 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Increasing the time-constant of a thin film multijunction thermal converter for low frequency application |
| Autor(in); Institution |
Klonz, Manfred; 2.43, Thermoelektrische Sensoren, PTB-Braunschweig
Weimann, Thomas; 2.24, Dünnschichtstrukturen, PTB-Braunschweig
|
| Quelle/Jahr | CPEM '90 digest ; June 11 - 14 juin 1990, Ottawa, Canada:(1990), 134 - 135 |
| Herausgeber(in) |
Hanes, Gary R.
|
| Verlag | New York, NY: IEEE |
| Konferenzangaben | Conference on Precision Electromagnetic Measurements (CPEM) 1990, Ottawa, 11-14, June, 1990, Canada |
| Zusammenfassung | To optimize the planar thin film multijunction thermal converter (MJTC) developed in PTB for low frequency application a thernal mass is added in the heater area to increase the time-constant of the MJTC from 100 ms to 3 s and more. The thermal mass of silicon is left under the heater during the anisotropical etching process. |