| Zugriffsnummer | 38030 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices |
| Autor(in); Institution |
Chen, Xiaomei; Cranfield University, Centre for Autonomous and Cyber-Physical System, Cranfield, UK
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Parkinson, Simon; University of Huddersfield, School of Computing, Huddersfield, West Yorkshire, UK
|
| Quelle/Jahr | Applied Optics: 56 (2017), 9, 2434 - 2443 |
| ISSN | 1559-128X (PRINT) ; 2155-3165 (ONLINE) |
| DOI | |
| Verlag | Washington, DC: OSA |
| Freie Schlagworte | Instrumentation, measurement, and metrology ; Imaging processing ; Spatial filtering ; Microscopy |
| Zusammenfassung | We have mathematically explicated and experimentally demonstrated how a correlation and convolution filter can dramatically suppress the noise that coexists with the raster-scanned topographic signals of 2D gratings and lattices with 2-dimensional (2D) perspectives. To realize pitch evaluation, the true peaks’ coordinates have been precisely acquired after local maxima detecting from the filtered signal and followed by image processing. 2D filtering, local maxima detecting and image processing make up the pitch detection (PD) method. It is elucidated that the pitch average, uniformity, rotation angle, orthogonal angle can be calculated using the PD-method. It has been applied to the pitch evaluation of several 2D gratings and lattices, and the results are compared with that evaluated by the CG- and FT-method. The differences of pitch averages which are evaluated by the PD-, CG- and FT-methods are within 1.5 pixels. Moreover, the PD-method has been also applied to detect the dense peaks of Si (111) 7×7 surface and HOPG basal plane |
