| Zugriffsnummer | 37575 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Simultaneous measurement of lateral and vertical size of nanoparticles using transmission scanning electron microscopy (TSEM) |
| Autor(in); Institution |
Buhr, Egbert; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Bug, Marion U.; 6.5, Strahlenwirkung, PTB-Braunschweig
Bergmann, Detlef; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Cizmar, Petr; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Frase, Carl Georg; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 28 (2017), 3, 034002-1 - 034002-8 |
| ISSN | 0957-0233 ; 1361-6501 |
| DOI | |
| Verlag | Bristol: IOP |
| Konferenzangaben | Nanoscale 2016, 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods, Wroclaw, 09-11, March, 2016, Poland |
| Freie Schlagworte | nanoparticle size ; nanoparticle thickness ; transmission scanning electron microscopy ; electron scattering ; Monte-Carlo simulation ; Geant4 ; MCSEM |
| Zusammenfassung | A scanning electron microscope operated in transmission mode (TSEM) enables both the measurement of the lateral and vertical size (thickness) of nanoparticles. The lateral size is measured with a previously described technique where the particle boundary is determined in the TSEM image. Particle thickness is deduced from the TSEM signal level measured at the centre of the particle, which requires prior knowledge of the expected TSEM signal level. We applied different and well-known Monte-Carlo based simulation tools (Geant4 and MCSEM) to describe the electron diffusion in solid states and to calculate the expected TSEM signals taking into account particle and instrument properties. The simulation results of the different simulation models differ slightly revealing current limits of small-angle and low-energy electron scattering modelling in solid states.Nonetheless, the method allows one to correlate lateral and vertical particle thickness and thus to obtain additional information about the 3D morphology of nanoparticles. We demonstrate the method for silica particles with sizes in the range of about 10 nm to 100 nm. |
Zitierung
Buhr, E., Bug, M. U., Bergmann, D., Cizmar, P., & Frase, C. G. (2017). Simultaneous measurement of lateral and vertical size of nanoparticles using transmission scanning electron microscopy (TSEM). Measurement Science and Technology, 28(3), 034002-1–034002-8. https://doi.org/10.1088/1361-6501/28/3/034002