| Zugriffsnummer | 37490 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Magnetron sputtering process for homogeneous internal coating of hollow cylinders |
| Autor(in); Institution |
Kaune, Gunar; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Hagedorn, Daniel; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Löffler, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Surface and Coatings Technology: 308 (2016), 57 - 61 |
| ISSN | 0257-8972 (PRINT) ; 0257-8972 (ONLINE) |
| DOI | |
| Verlag | Amsterdam: Elsevier |
| Konferenzangaben | The 43rd International Conference on Metallurgical Coatings and Thin Films, San Diego, Calif., 24-29, April, 2016, USA |
| Freie Schlagworte | Thin film ; Internal coating ; Magnetron sputtering |
| Zusammenfassung | A magnetron sputtering system to coat tubes and hollow bodies with functional thin films on their internal surface was designed, constructed, and successfully set up. A rod of the coating material is drawn coaxially through substrate body and serves as the target, and a magnetic field is applied to enhance the plasma intensity and to control the deposition process. Generated by a system of external coils, the magnetic field is subdivided into five adjustable sectors. This allows a local adjustment of the plasma intensity and the control of the deposition process, e.g., for the improvement of film homogeneity, the local modification of film structures, or the introduction of graded thickness profiles. Thin copper coatings were prepared on the internal surface of glass tubes with an inner diameter of 17.6 mm. Depending on the configuration of the applied magnetic field, the thickness of the coatings varies along the axial direction between maximal, graded, or constant in the middle of the substrates. By adjusting the magnetic field configuration and compensating asymmetries of the experimental set-up, coatings with a low deviation in thickness over more than 50% of the total substrate length were achieved. The coatings have a smooth surface and a dense structure with small grains. |
