| Zugriffsnummer | 37472 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements |
| Autor(in); Institution |
Haase, Anton; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Bajt, Sasa; Photon Science, DESY, Hamburg, GERMANY
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Journal of Applied Crystallography: 49 (2016), 2161 - 2171 |
| ISSN | 1600-5767 |
| DOI | |
| Verlag | Copenhagen: Munksgaard |
| Konferenzangaben | Physics of X-Ray and Neutron Multilayer Structures Workshop 2016, Enschede, 10 and 11 November, 2016, The Netherlands |
| Freie Schlagworte | multilayers ; water window ; metrology ; roughness ; interdiffusion |
| Zusammenfassung | Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X-ray reflectance measurements, resonant EUV reflectance across the Sc L edge, and X-ray standing wave fluorescence measurements were used. The parameters of the multilayer model were determined via a particle-swarm optimizer and validated using a Markov chain Monte Carlo maximum-likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 2.0 ; Creative Commons Attribution 2.0 License ; Originalartikel under: Creative Common 2.0 licence |