| Zugriffsnummer | 37375 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Nonlinearity of a double-path interferometer qualified with a non-constant moving speed |
| Autor(in); Institution |
Hongxing, Yang; Harbin Institute of Technology, Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin, CHINA
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köchert, Paul; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Optics Letters: 41 (2016), 23, 5478 - 5481 |
| ISSN | 0146-9592 (PRINT) ; 1539-4794 (ONLINE) |
| DOI | |
| Verlag | Washington, DC: Optical Society of America |
| Klassifikationscode | OCIS: 120.3180 ; OCIS: 120.4640 ; OCIS: 130.0130 ; OCIS: 140.0140 |
| Freie Schlagworte | optical metrology ; nonlinearity ; double-pass interferometer |
| Zusammenfassung | A new double-path heterodyne interferometer with spatially separated input beams was developed to minimize the influence of periodic errors. The optics of measuring and reference interferometers are balanced by optimizing optical components, which means phase offsets caused by the optical path differences, and thermal influence on the optics are reduced. Furthermore, due to the usage of corner cube reflectors, the interferometer is capable to tolerate angular motions of the measuring mirror. The nonlinearities were characterized in a measurement with non-constant moving speed by means of amplitude spectra for spline-interpolated data. Experimental results indicated that the amplitude of the periodic error was kept within 0.63 nm and was caused by multi-reflections. |
