| Zugriffsnummer | 37007 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS |
| Autor(in); Institution |
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Engl, Wolfang; NanoWorld Services GmbH, Erlangen, GERMANY
Sulzbach, Thomas; NanoWorld Services GmbH, Erlangen, GERMANY
Stahl, Stefan W.; Ludwig-Maximilians-Universität (LMU), Munich, GERMANY
Milles, Lukas F.; Ludwig-Maximilians-Universität (LMU), Munich, GERMANY
Nesterov, Vladimir; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Li, Zhi; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 28 (2017), 3, 034010-1 - 034010-12 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP |
| Konferenzangaben | Nanoscale 2016, 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods, Wroclaw, 09-11, March, 2016, Poland |
| Freie Schlagworte | Stiffness |
| Zusammenfassung | PTB has developed a new method for the traceable calibration of the normal stiffness of AFM cantilevers to the SI units based on Micro-Electro-Mechanical System (MEMS) actuators. This method is evaluated by comparing the measured cantilever stiffness with that measured by PTB’s new primary nanonewton force facility and by PTB’s microforce measuring device. The MEMS system was used to calibrate the stiffness of cantilevers in two case studies. One set of cantilevers for applications in biophysics was calibrated using the well-known thermal vibration method and the second set of cantilevers was calibrated by a cantilever manufacturer who applied an improved thermal vibration method based on calibrated reference cantilevers for the cantilever stiffness calibration. The comparison revealed a stiffness deviation of + 7.7 % for the cantilevers calibrated using the thermal vibration method and a deviation of + 6.9 % for the stiffnesses of the cantilevers calibrated using the improved thermal vibration method. |
Zitierung
Brand, U., Gao, S., Engl, W., Sulzbach, T., Stahl, S. W., Milles, L. F., Nesterov, V., & Li, Z. (2017). Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS. Measurement Science and Technology, 28(3), 034010-1–034010-12. https://doi.org/10.1088/1361-6501/28/3/034010