| Zugriffsnummer | 36751 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | A new form measurement system based on sub-aperture stitching with a line-scanning interferometer |
| Autor(in); Institution |
Laubach, Sören; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Riebeling, Jörg; University of Kassel, Department of Electrical Engineering, Chair in Measurement Technology (CMT), Kassel, GERMANY
Lehmann, Peter; University of Kassel, Department of Electrical Engineering, Chair in Measurement Technology (CMT), Kassel, GERMANY
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| Quelle/Jahr | Advanced Optical Technologies:(2016) |
| ISSN | 2192-8576 (PRINT) ; 2192-8584 (ONLINE) |
| DOI | |
| Verlag | Berlin: De Gruyter |
| Freie Schlagworte | Interferometrie ; 3D-Messtechnik ; Formmesstechnik ; form measurement ; interferometry ; metrology |
| Zusammenfassung | A new optical form measurement system for almost rotational symmetric surfaces has been set up. It is based on an interferometric line sensor applying sinusoidal path length modulation in combination with a movement system. With this system ring-shaped sub-apertures of the specimens are measured. The system is especially suitable for measuring spheres and aspheres with a broad range of radii (r > 50mm). The individual sub-apertures are stitched together to yield the full 3D topography. Since rotation of the specimen by more than 360 degrees has to yield the same results, inherent consistency tests are possible. Example measurements of a sphere are shown and discussed. The reproducibility of the system is about 14 nm standard deviation. The system can be set up at a moderate price since off-the-shelf mechanical and optoelectronic devices can be used. Future improvements of the system are discussed. |
