| Zugriffsnummer | 36715 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter |
| Autor(in); Institution |
Quabis, Susanne; 4.2, Bild- und Wellenoptik, PTB-Braunschweig; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Asar, Muharrem; TUBITAK UME, Gebze-Kocaeli, TURKEY
Balling, Petr; Czech Metrology Institute (CMI), Praha, CZECH REPUBLIC
Kren, Petr; Czech Metrology Institute (CMI), Praha, CZECH REPUBLIC
Bergmans, Rob H.; VSL, Delft, THE NETHERLANDS
Küng, Alain; METAS, Bern-Wabern, SWITZERLAND
Lassila, Antti; VTT MIKES, Espoo, FINLAND
Putland, David; National Physical Laboratory (NPL), Teddington, UK
Williams, David; National Physical Laboratory (NPL), Teddington, UK
Pirée, Hugo; SMD, Brussels, BELGIUM
Prieto, Emilio; CEM, Madrid, SPAIN
Pérez, M. del Mar; CEM, Madrid, SPAIN
Svedova, Larisa; LATMB, Riga, LATVIA
Ramotowski, Zbigniew; GUM, Warszawa, POLAND
Vannoni, Maurizio; CNR, Firenze, ITALY
Hungwe, Faith; NMISA, Pretoria, SOUTH AFRICA
Kang, Yanhui; NIM, Beijing, P.R. CHINA
|
| Quelle/Jahr | Metrologia: 54 (2017), 1, 85 - 93 |
| ISSN | 0026-1394 (PRINT) ; 1681-7575 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publ. |
| Freie Schlagworte | flatness measurement ; EURAMET ; interferometry ; scanning ; deflectometry |
| Zusammenfassung | Recently, a scientific comparison of flatness measuring instruments at European National Metrology Institutes (NMIs) was performed in the framework of EURAMET. The specimen was a well-polished optical surface with a maximum measurement aperture of 150 mm. Here, we present an evaluation concept, which allows the determination of a mean topography taking into account different lateral resolutions of the instruments and different orientations of the specimen during measurement. We found that all measurements are in agreement with the mean topography within the uncertainty intervals stated by the participants. The aim of this scientific comparison is to specify an appropriate operation and evaluation procedure for a future key comparison. |
| Kostenfreier Zugang | Open Access Hybrid |
| Rechteinformation | CC BY 3.0 ; Creative Commons Attribution 3.0 License |
Zitierung
Quabis, S., Schulz, M., Ehret, G., Asar, M., Balling, P., Kren, P., Bergmans, R. H., Küng, A., Lassila, A., Putland, D., Williams, D., Pirée, H., Prieto, E., Pérez, M. D. M., Svedova, L., Ramotowski, Z., Vannoni, M., Hungwe, F., & Kang, Y. (2017). Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter. Metrologia, 54(1), 85–93. https://doi.org/10.1088/1681-7575/aa535c