| Zugriffsnummer | 36647 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Creation of defined roughness on curved surfaces with Focused Ion Beam (FIB) for the evaluation of various surface measurement techniques |
| Autor(in); Institution |
Dziomba, Thorsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Felgner, André; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Neuschaefer-Rube, Ulrich; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Hemmleb, Matthias; m2c calibration, Potsdam, GERMANY
|
| Quelle/Jahr | NanoScale 2016, 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods:(2016), 31 - 34 |
| Verlag | [s.l.]: |
| Konferenzangaben | NanoScale 2016, 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods, Wroclaw, 09-11, March, 2016, Poland |
| Freie Schlagworte | roughness ; Focused Ion Beam ; FIB ; calibration ; confocal laser scanning microscopy ; CLSM |
| Zusammenfassung | The roughness of a surface is often decisive for the function of a work piece. It may also influence the measurements of other dimensional quantities such as the structure width or the radius of curvature. Consequently, the correct measurement of roughness and the accounting of roughness influences belong to the main research directions in dimensional metrology. At the same time, many users of form measurement instruments demand a reduction of measurement uncertainty, which requires, among others, a better understanding of roughness-related measurement artefacts. For all these tasks, fields with a precise well-defined surface texture are required. Focused ion beam technology (FIB) is a versatile tool to create purpose-tailored surface textures. While FIB is probably too expensive for the routine fabrication of roughness standards for the ordinary user, its flexibility is promising for the study of roughness itself and of roughness-related influences by research institutes. This presentation focuses on the application of FIB for the creation of larger roughness fields on curved surfaces. In order to be suitable for various optical surface measurement techniques, a field size of about 300 μm × 300 μm is desirable. For the works discussed here, a roughness with Sq = 123 nm and Sz = 1420 nm was chosen. Tests on flat silicon substrates showed that such roughnesses can be written by FIB milling in fields up to 180 μm × 180 μm in size, while unwanted milling effects and/or a massive loss of high-frequency components occur if larger fields are fabricated at once. For this reason, stitching of 2×2 fields of 145 μm x 145 μm was implemented to obtain total field sizes of 290 μm × 290 μm. In order to minimize the stitching gap, ring-shaped markers as reference points were introduced that are written slightly outside the field to be structured. These markers allow the fine position adjustment when moving from one stitching field to the next during the roughness writing process. These alignments are even more important when structuring a curved surface instead of a flat one. A further reduction of stitching gaps was achieved by careful modification of the input data set at the boundaries of the tiles. In order to study the measurement properties at curved surfaces, such 290 μm × 290 μm roughness fields have also been created on a cylinder of r ~ 400 μm and on a sphere with r ~ 575 μm, i. e. the field covers about 1/11 of the perimeter, corresponding to an angle section of about 33°. As the conventionally available wires and spheres typically show significant roughness themselves, they were first coated with a Ni[P] layer and then carefully polished in an ultra precision process developed at PTB, in order to turn them at least 10 times smoother than the defined roughness to be written by FIB in the following. In the FIB process, the surface curvature is accounted for. Investigations by CLSM (Olympus LEXT) and AFM (SIS Nanostation II) reveal that the key roughness parameters agree with the FIB input data model within 10 % to 20 %. The remaining deviations are due to form deviations of the cylinder/sphere as well as curvature-related fabrication and measurement artefacts that are currently being studied further. The samples are applied at PTB to check the measurement capabilities of focus variation and interference microscopes. |
Zitierung
Dziomba, T., Felgner, A., Koenders, L., Danzebrink, H.-U., Meeß, R., Neuschaefer-Rube, U., & Hemmleb, M. (2016). Creation of defined roughness on curved surfaces with Focused Ion Beam (FIB) for the evaluation of various surface measurement techniques. NanoScale 2016, 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods, Wroclaw, 09-11, March, 2016, Poland.