| Zugriffsnummer | 36618 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Optical form measurements with a scanning point sensor in null configuration |
| Autor(in); Institution |
Straub, Andreas; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Laubach, Sören; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Blobel, Gernot; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | DGaO-Proceedings: 117 (2016) |
| Availability | [Online only] |
| ISSN | 1614-8436 |
| Persistent Identifier | |
| URL | |
| Verlag | Erlangen: Deutsche Gesellschaft für angewandte Optik |
| Konferenzangaben | 117th annual Meeting of the German Society of applied optics (DGaO), Hannover, 17-21, Mai, 2016, Deutschland |
| Freie Schlagworte | Form Measurement ; Pointwise measurement |
| Zusammenfassung | Asphere and freeform metrology systems often need a coarse preinformation about the form of the specimen. For this purpose we used a three axes system in combination with a point sensor in null configuration. This system has the capability to measure the form with sub-µm accuracy. The setup can be applied for various specimens with a surface slope up to 30°. |
