| Zugriffsnummer | 36421 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Correlated diffuse X-ray scattering from periodically nano-structured surfaces |
| Autor(in); Institution |
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Haase, Anton; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Wernecke, Jan; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Probst, J.; Helmholtz-Zentrum Berlin (HZB), Berlin, GERMANY
Schoengen, M.; Helmholtz-Zentrum Berlin (HZB), Berlin, GERMANY
Burger, S.; Zuse Institute Berlin (ZIB), Berlin, GERMANY
Krumrey, Michael; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Physical Review B: 94 (2016), 035419-1 - 035419-5 |
| ISSN | 1098-0121 (PRINT) ; 1095-3795 (ONLINE) |
| DOI | |
| Verlag | Melville, NY: American Physical Society (APS) |
| Zusammenfassung | Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. To support an improved reconstruction of nanostructured surface geometries, we investigated the origin of the contributions to the diffuse scattering pattern which is correlated to the surface roughness. Resonant diffuse scattering leads to a palm-like structure of intensity sheets. Dynamic scattering generates the so-called Yoneda band caused by a resonant scatter enhancement at the critical angle of total reflection and higher-order Yoneda bands originating from a subsequent diffraction of the Yoneda enhanced scattering at the grating. Our explanations are supported by modelling using a solver for the time-harmonic Maxwell’s equations based on the finite-element method. |
Zitierung
Soltwisch, V., Haase, A., Wernecke, J., Probst, J., Schoengen, M., Burger, S., Krumrey, M., & Scholze, F. (2016). Correlated diffuse X-ray scattering from periodically nano-structured surfaces. Physical Review B, 94, 035419-1–035419-5. https://doi.org/10.1103/physrevb.94.035419