| Zugriffsnummer | 35962 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Update on EUV radiometry at PTB |
| Autor(in); Institution |
Laubis, Christian; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Barboutis, Annett; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Buchholz, Christian; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Fischer, Andreas; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Haase, Anton; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Knorr, Florian; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Mentzel, Heiko; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Puls, Jana; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Schönstedt, Anja; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Sintschuk, Michael; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Soltwisch, Victor; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Stadelhoff, Christian; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Scholze, Frank; 7.1, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
|
| Quelle/Jahr | Extreme Ultraviolet (EUV) Lithography VII:(2016), 977627-1 - 977627-8 |
| Schriftenreihe | Proceedings of SPIE: 9776 |
| Herausgeber(in) |
Panning, Eric M.
|
| ISSN | 0277-786X |
| ISBN | 978-1-5106-0011-9 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Extreme Ultraviolet (EUV) Lithography VII, San José, CA, 21-25 February 2016, USA |
| Freie Schlagworte | EUV ; at-wavelength ; radiometry ; metrology ; reflectometry ; exposure |
| Zusammenfassung | The development of technology infrastructure for EUV Lithography (EUVL) still requires higher levels of technology readiness in many fields. A large number of new materials will need to be introduced. For example, development of EUV compatible pellicles to adopt an approved method from optical lithography for EUVL needs completely new thin membranes which have not been available before. To support these developments, PTB with its decades of experience in EUV metrology provides a wide range of actinic and non actinic measurements at in-band EUV wavelengths as well as out of band. Two dedicated, complimentary EUV beamlines are available for radiometric characterizations benefiting from small divergence or from adjustable spot size respectively. The wavelength range covered reaches from below 1 nm to 45 nm for the EUV beamlines to longer wavelengths if in addition the VUV beamline is employed. The standard spot size is 1 mm by 1 mm with an option to go as low as 0.1 mm to 0.1 mm. A separate beamline offers an exposure setup. xposure power levels of 20 W/cm2 have been employed in the past, lower fluencies are available by attenuation or out of focus exposure. Owing to a differential pumping stage, the sample can be held under defined gas conditions during exposure. We present an updated overview on our instrumentation and analysis capabilities for EUV metrology and provide data for illustration. |
| Themenbereich der Metrologie | Photometrie und Radiometrie |
Zitierung
Laubis, C., Barboutis, A., Buchholz, C., Fischer, A., Haase, A., Knorr, F., Mentzel, H., Puls, J., Schönstedt, A., Sintschuk, M., Soltwisch, V., Stadelhoff, C., & Scholze, F. (2016). Update on EUV radiometry at PTB. Extreme Ultraviolet (EUV) Lithography VII, San José, CA, 21-25 February 2016, USA. https://doi.org/10.1117/12.2218902