| Zugriffsnummer | 35508 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Partial pressure measurement standard for characterizing partial pressure analyzers and measuring outgassing rates |
| Autor(in); Institution |
Jousten, Karl; 7.5, Wärme und Vakuum, PTB-Berlin
Putzke, Stephan; 7.5, Wärme und Vakuum, PTB-Berlin
Buthig, Joachim; 7.5, Wärme und Vakuum, PTB-Berlin
|
| Quelle/Jahr | Journal of Vacuum Science and Technology A: 33 (2015), 061603-1 - 061603-10 |
| ISSN | 0734-2101 (PRINT) ; 1520-8559 (ONLINE) |
| DOI | |
| Verlag | New York, NY: AIP |
| Zusammenfassung | In this work, a measurement standard was established for partial pressures in high and ultrahigh vacuum conditions. Three (or more, with higher uncertainty) different gases with known partial pressures from 10-8 to 10-2 Pa can be generated in a calibration chamber of an ultrahigh vacuum system by a continuous expansion method. The ratio between two partial pressures can range from 10-6 to 1. The readings of partial pressure analyzers can be calibrated by comparing them to known partial pressures. The calibration chamber is connected to a sample chamber, where outgassing samples can be inserted via a load lock. With an in situ calibrated partial pressure analyzer, the outgassing rate from the samples can be measured in a traceable way to the international systems of units. |
