| Zugriffsnummer | 35231 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | A MEMS device for the calibration of AFM cantilever stiffness |
| Autor(in); Institution |
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Hahn, Susann; Chemnitz University of Technology, Chemnitz, GERMANY
Hiller, Karla; Chemnitz University of Technology, Chemnitz, GERMANY
|
| Quelle/Jahr | 7. Kolloquium Mikroproduktion Aachen:(2015), 165 - 173 |
| Availability | [CD-ROM] |
| Herausgeber(in) |
Hopmann, Ch.
|
| ISBN | 978-3-00-050-755-7 |
| Verlag | Aachen: Institut für Kunststoffverarbeitung (IKV) |
| Konferenzangaben | 7. Kolloquium Mikroproduktion, Aachen, 16-17, November, 2015, Deutschland |
| Freie Schlagworte | MEMS nano-force transducer ; stiffness calibration ; reference spring ; AFM cantilever |
| Zusammenfassung | Quantitative nano-mechanical measurements using atomic force microscopy (AFM) demand the normal spring constant of AFM cantilevers in use to be carefully calibrated. For this purpose, a MEMS nanoforce transducer has been developed at PTB. The MEMS device is based on the principle of a lateral comb-drive, in which the electrostatic force will be generated by applying a voltage between the fixed and the movable combs, and the displacement of the MEMS is detected by an integrated capacitive sensor or a fiber interferometer. The MEMS force transducer has been fabricated using the Bonding DRIE technology developed at TU Chemnitz. With this MEMS nanoforce transducer, three kinds of cantilever stiffness calibration methods have been investigated: the passive reference spring method, the active reference spring method and the dynamic reference spring method. |
