| Zugriffsnummer | 34786 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Current developments on optical asphere and freeform metrology |
| Autor(in); Institution |
Mühlig, Stefan; Mahr GmbH, Jena, GERMANY
Siepmann, Jens; Mahr GmbH, Jena, GERMANY
Lotz, Markus; Mahr GmbH, Jena, GERMANY
Wiegmann, Axel; 4.2, Bild- und Wellenoptik, PTB-Braunschweig; Mahr GmbH, Jena, GERMANY
Blobel, Gernot; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Mika, Stefan; Mahr GmbH, Jena, GERMANY
Beutler, Andreas; Mahr GmbH, Göttingen, GERMANY
Nehse, Uwe; Mahr GmbH, Jena, GERMANY
|
| Quelle/Jahr | Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V:(2015), 9628-38 |
| Schriftenreihe | Proceedings of SPIE: 9628 |
| Herausgeber(in) |
Duparré, Angela
|
| ISBN | 978-1-6284-1817-0 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | SPIE Optical System Design, Jena, 07-10, September, 2015, Germany |
| Freie Schlagworte | Twyman-Green interferometer ; White light interferometry ; High accuracy cylinder coordinate measuring machine ; Tilted wave interferometer ; Asphere and freeform measurement |
| Zusammenfassung | High end performance optical devices are a key technology for modern production industry. Aspheres and freeform surfaces become core elements of optical systems for different reasons. With them it is possible to reduce the number of optical components and to minimize the optical aberrations. Thus, the overall performance of the entire system can be hugely enhanced. In principle, optical surfaces can be measured by tactile or optical probe systems. The advantage of an optical measurement is the contactless acquisition of measuring points. In this contribution two different concepts are discussed to measure asphere and freeform surfaces. The first one is the tilted wave interferometer where a huge number of different monochromatic light sources illuminating the object are applied. Each of them produces a defined tilt of the wavefront. This tilt allows to locally compensating the gradient deviation of the SUT from a best fit sphere. Thus a gradient deviation of the SUT up to 10 degree from the best fit sphere can be measured without using a CGH or stitching. The second concept is based on an optical point sensor which is based on white light interferometry which detects the absolute distance to the SUT. A scanning along the SUT allows characterizing the form deviation of the SUT from the nominal design. Measurements of aspheres and freeforms applying both concepts are presented and compared. Advantages and challenges of both measuring concepts are discussed. Furthermore, the further development of both concepts is outlined focusing on the reduction of the measurement uncertainty. |
Zitierung
Mühlig, S., Siepmann, J., Lotz, M., Wiegmann, A., Blobel, G., Mika, S., Beutler, A., & Nehse, U. (2015). Current developments on optical asphere and freeform metrology. SPIE Optical System Design, Jena, 07-10, September, 2015, Germany. https://doi.org/10.1117/12.2191247