| Zugriffsnummer | 34770 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Adaptive estimation of complex calibration residual errors of wafer-level S-parameters measurement system |
| Autor(in); Institution |
Savin, Aleksandr A.; Tomsk State University of Control Systems and Radioelectronics, Tomsk, RUSSIA
Guba, Vladimir G.; NPK TAIR, a subsidiary of Copper Mountain Technologies, Tomsk, RUSSIA
Rumiantsev, Andrej; MPI Corporation, Advanced Semiconductor Test Division, Chu-Pei City, TAIWAN
Maxson, Benjamin D.; Copper Mountain Technologies, Indianapolis, USA
Schubert, Dirk; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
Arz, Uwe; 2.2, Hochfrequenz und Felder, PTB-Braunschweig
|
| Quelle/Jahr | 2014 84th ARFTG Microwave Measurement Conference (ARFTG 2014):(2014), 48 - 51 |
| ISBN | 978-1-4799-7084-1 ; 978-1-4799-7086-5 |
| Verlag | Piscataway, NJ: IEEE |
| Konferenzangaben | 84th ARFTG Microwave Measurement Conference, Boulder, CO, 04-05, December, 2014, USA |
| Freie Schlagworte | S-parameters ; vector network analyzer (VNA) ; verification ; residual errors ; on-wafer measurements ; unscented Kalman filter (UKF) |
| Zusammenfassung | This article presents a method for determining complex residual errors of calibrated two-port vector network analyzers. It utilizes the time-domain technique. Calibration residual errors are extracted from a distance-frequency system model using a special estimation algorithm based on the quasi-optimal unscented Kalman filter. Because the method requires only three measurement conditions, it is in particular beneficial for on-wafer applications, as three test conditions can be obtained from using only on transmission line. Moreover, the length of the line can be relatively short. Experimental studies were performed and verified the proposed method. |
Zitierung
Savin, A. A., Guba, V. G., Rumiantsev, A., Maxson, B. D., Schubert, D., & Arz, U. (2014). Adaptive estimation of complex calibration residual errors of wafer-level S-parameters measurement system. 84th ARFTG Microwave Measurement Conference, Boulder, CO, 04-05, December, 2014, USA.