| Zugriffsnummer | 34591 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films: additional techniques |
| Autor(in); Institution |
Abou-Ras, D.; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Berlin, GERMANY
Caballero, R.; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Berlin, GERMANY
Streeck, Cornelia; 7.2, Kryophysik und Spektrometrie, PTB-Berlin
Beckhoff, Burkhard; 7.2, Kryophysik und Spektrometrie, PTB-Berlin
In, J.; School of Mechatronics, Gwangju Institute of Science and Technology, Oryong-dong, Buk-gu, REPUBLIC OF KOREA
Jeong, S.; School of Mechatronics, Gwangju Institute of Science and Technology, Oryong-dong, Buk-gu, REPUBLIC OF KOREA
|
| Quelle/Jahr | Microscopy and Microanalysis: 21 (2015), 6, 1644 - 1648 |
| ISSN | 1431-9276 (PRINT) ; 1435-8115 (ONLINE) |
| DOI | |
| Verlag | New York, NY: Cambridge University Press |
| Freie Schlagworte | elemental distributions ; thin films ; laser-induced breakdown spectroscopy ; grazing-incidence X-ray flouresence analysis |
| Zusammenfassung | In a recent publication by Abou-Ras et al., various techniques for the analysis of elemental distribution in thin films were compared, using the example of a 2-µm thick Cu (In,Ga)Se2 thick film applied as an absorber material in a solar cell. The authors of this work found that similar relative Ga distributions perpendicular to the substrate across the Cu(In,Ga)Se2 thin film were determined by 18 different techniques, applied on samples from the same identical deposition run. Their spatial and depth resolutions, their measuring speeds, their availabilities, as well as their detection limits were discussed. The present work adds two further techniques to this comparison: laser-induced breakdown spectroscopy and grazing-incidence X-ray fluorescence analysis. |
Zitierung
Abou-Ras, D., Caballero, R., Streeck, C., Beckhoff, B., In, J., & Jeong, S. (2015). Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films: additional techniques. Microscopy and Microanalysis, 21(6), 1644–1648. https://doi.org/10.1017/s1431927615015093